Modeling and Simulation of Novel Structure for Sub-millimeter Solid-state Accelerometer with Piezoresistive Sensing Elements
نویسنده
چکیده
This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The proposed sensor can detect three components of linear acceleration simultaneously. The sensing structure consists of combined cross-beam and surrounding beams and seismic mass. Therefore, this novel proposed sensor is showing good performance than other miniaturized sensor structures reported thus far.
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